abstract |
[PROBLEMS] To provide a dense silicon nitride sinter having conductivity. [MEANS FOR SOLVING PROBLEMS] To a silicone nitride/rare-earth oxide/aluminum oxide system or a silicon nitride/rare-earth oxide/magnesia system is optionally added an oxide of a titanium group element, such as titanium oxide, hafnium oxide, or zirconium oxide, aluminum oxide, and/or aluminum nitride. Thereto is added an appropriate amount of carbon nanotubes (CNT). The CNT react with the silicon nitride and other ingredients which are in contact therewith or close thereto, depending on the period of burning at a high temperature, to yield silicon carbide (SiC). Becausethe silicon carbide is yielded along the nanotubes, the resultant sinter functions as a conductor excellent in heat resistance, corrosion resistance, etc. |