Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e192399f1ed571e0fa6dc1f5adec72cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff14834826b1048bb9feeb545583b322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-093 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-12 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-16 |
filingDate |
2005-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cf0a040895e91c114fb1b3848cfdc07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e4bc118683d8e580099af56038101a8 |
publicationDate |
2006-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2006033455-A1 |
titleOfInvention |
Antistatic treatment agent, and antistatic film, coated article and pattern forming method using the agent |
abstract |
The invention provides an antistatic treatment agent having an ability of preventing resist film thinning phenomenon in a chemically amplified resist, an antistatic film, a coated article and a pattern forming method using such antistatic treatment agent, in particular, the invention provides an antistatic treatment agent comprising an aqueous solvent-soluble electroconductive polymer, a diamine (divalent) or polyamine (polyvalent) aliphatic basic compound and an anionic surfactant, an antistatic film, a coated article and a pattern forming method using such antistatic treatment agent. As the aqueous solvent-soluble electroconductive polymer, a n-conjugated electroconductive polymer, a π-conjugated electroconductive polymer having a Brönsted acid group is a sulfonic acid group is preferred and it is preferable that the amount of the diamine (divalent) or polyamine (polyvalent) aliphatic basic compound be from 0.1 to 75 mol % based on the total number of moles of the basic compounds. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9558862-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016122028-A |
priorityDate |
2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |