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filingDate 2005-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3f921ff5a3afbc899b58efa1a9bf596
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publicationDate 2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2006030609-A1
titleOfInvention Lactone compound, lactone-containing monomer, polymer of those, resist composition using same, method for forming pattern using same
abstract Disclosed are novel first to fourth lactone compounds. The first lactone compound is represented by the formula (1) below. (1) In the formula, X represents CH2, CH2CH2, O, S or NR1; R1 represents a hydrogen atom or a straight chain, branched or cyclic alkyl group having 1-10 carbon atoms. A part or all of hydrogen atoms in the alkyl group may be substituted by fluorine atoms, and a part of the alkyl group may include an atomic group containing an oxygen atom, a sulfur atom, a nitrogen atom, a carbon-carbon double bond, a carbonyl group, a hydroxy group or a carboxyl group.
priorityDate 2004-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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