Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_79dbddc0d5746fc3db01ebc459aefb32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43e9bc481473b7735d51aacc3e34fbba http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_746f80c63604b1359eeee8de0f41886d |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01019 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49121 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-49171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-19041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01078 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-10253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2889 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-30111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3011 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07378 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
filingDate |
2005-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77453056138fefbc4cccc87d7b2581d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d3050373668594e0ed1ca323f23e009 |
publicationDate |
2006-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2006023741-A2 |
titleOfInvention |
Method to build a wirebond probe card in a many at a time fashion |
abstract |
Resilient spring contacts (140) for use in wafer test probing are provided that can be manufactured with a very fine pitch spacing and precisely located on a support substrate. The resilient contact structures (140) are adapted for wire bonding to an electrical circuit on a space transformer substrate (160). The support substrates (150) with attached spring contacts can be manufactured together in large numbers and diced up and tested before attachment to a space transformer substrate (160) to improve yield. The resilient spring contacts (140) are manufactured using photolithographic techniques to form the contacts on a release layer, before the spring contacts (140) are epoxied to the support substrate (150) and the release layer removed. The support substrate (150) can be transparent to allow alignment of the contacts and testing of optical components beneath. The support substrate can include a ground plane provided (152) beneath the spring contacts for improved impedance matching. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101034947-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009066979-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009066979-A3 |
priorityDate |
2004-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |