| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e6e6224b5796f1391378ce3708bee46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_77212be9386576ce90d2042ba67f93a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f784ea410809498e802ae8a27ef714c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F19-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-04 |
| filingDate |
2005-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cf56b0b82605a541e36db61ad8ce44e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca3974de1d84148f355e9cc8e3cc430f |
| publicationDate |
2006-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2006012294-A2 |
| titleOfInvention |
Chemical vapor deposition with nucleophilic stable carbene-containing precursors |
| abstract |
Novel main-group and transition-metal chemical vapor deposition precursors which incorporate nucleophilic stable carbene ligands for forming doped or undoped metal, metal oxide, and metal-nitride films are described. The coordination of nucleophilic stable carbene ligands to main-group and transition-metal fragments allows control over the molecular architecture of the precursor and the resultant ability to modify and control precursor physical characteristics. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019066179-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9453036-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012155264-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014518944-A |
| priorityDate |
2004-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |