| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7606ec80feefd5b6285b8dec9f23a7ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f96b103ef8a863b8627bd1b4678ac55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242386785fdb25ee610162593c3abc95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d7588c7517719f7dd428d4cb849f8b36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0fe54bff5a33072dd3c18436777e4b5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1627252d2a4fab3ebda6e9d208be42a8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2005-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35bc206857ef4cc2a08b9fac14284798
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42ed0536c109f198cd0805ca583e5765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1afb6fd14f4931da10780d605b2867b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e49c4325e38b3cd41eb09b843b08eb2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5df322c74f4c8a76108101831b3eba5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bc626dd42e1b04fca7ff45ef019164b |
| publicationDate |
2006-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2006007355-A1 |
| titleOfInvention |
Method for providing uniform removal of organic material |
| abstract |
A method for removing organic material over a substrate is provided. The substrate is placed in a plasma processing chamber. A first gas is provided to an inner zone within the plasma processing chamber. A second gas is provided to an outer zone of the plasma processing chamber, wherein the outer zone surrounds the inner zone and the second gas has a carbon containing component, wherein a concentration of the carbon containing component of the second gas is greater than a concentration of the carbon containing component in the first gas. Plasmas are simultaneously generated from the first gas and second gas. Some or all of the organic material is removed using the generated plasmas. |
| priorityDate |
2004-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |