| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b180ccfd653bfe22a3e0a1e229a59f33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d690fa1b8d836549f4eaaa5a443581d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-8445 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2005-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_407f005db4b1ce968cc66a77c64023e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13a77d86cfbc2e10056124632e867484 |
| publicationDate |
2006-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2006007313-A2 |
| titleOfInvention |
Improving water-barrier performance of an encapsulating film |
| abstract |
A method for depositing a material layer silicon nitride onto a substrate, comprising placing the substrate in a process chamber, delivering a mixture of precursors for the material layer and delivering a hydrogen gas into the process chamber to improve waterbarrier performance of the material layer. Controlling the temperature of the substrate to a temperature of about 100°C or lower, generating a plasma inside the process chamber; and depositing the material layer on the substrate. A method for depositing a multilayer including the material layer and a low dielectric constant material layer such as amorphous carbon, is also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170126078-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11217442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I498039-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008007588-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3093309-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9472610-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102525324-B1 |
| priorityDate |
2004-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |