| abstract |
A sputtering target characterized by being composed of a material mainly containing Y2O3, Al2O3 and SiO2, an optical information recording medium characterized in that at least a part of the structure thereof is formed as a thin film using the sputtering target and arranged adjacent to a recording layer or a reflective layer, and its producing method. Disclosed is a thin film for optical information recording medium (especially one used as a protective film) which has stable amorphous properties, excellent adhesion to the recording layer and mechanical characteristics, and high transmittance. Since the thin film is composed of a non-sulfide material, deterioration of the adjacent reflective layer and recording layer hardly occurs. A production method thereof and a sputtering target applicable thereto are also disclosed. Consequently, characteristics of the optical information recording medium are enhanced and productivity can be improved significantly. |