| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_27562ace359200dce7274340b5c7c28b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2c70165732ed0807d2c2074392bb072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7922f3daf4cf3e37acbed6e5cef2c6ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_346d6fdbfbc393959a774b52ba3f858a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ea9ab2cf09ee5b2fc3a41c9d7e9dcd8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03234119a985df6e02ba9fed21153474
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_78d97bb1f1142d3abd22fb762f26ea04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8389eed6b641de1cfa3edcd51b1d9417 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-36 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-10 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 |
| filingDate |
2005-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ff6148fa0237113d4c5d0c9cc47d566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0680cceefe62bca08586d832caf9f7d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5555ce59230bf727505d88951930ec69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdc38e36f5af69d9b5b38d268463990b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2729d3c00c3960c464632ccc55cd0eb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb75a8bdc2d47cafb08815a000f1f5f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6140b5b7153165ee7c03f30fb9e76dd |
| publicationDate |
2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2005114148-B1 |
| titleOfInvention |
Systems and methods for measurement or analysis of a specimen |
| abstract |
Various systems for measurement or analysis of a specimen are provided. One system includes a first optical subsystem, which is disposed within a purged environment (224). The purged environment (224) may be provided by a differential purging subsystem. The first optical subsystem performs measurements using vacuum ultraviolet light. This system also includes a second optical subsystem, which is disposed within a non-purged environment. The second optical subsystem performs measurements using non-vacuum ultraviolet light. Another system includes two or more optical subsystems configured to perform measurements of a specimen using vacuum ultraviolet light. The system also includes a purging subsystem configured to maintain a purged environment around the two or more optical subsystems. The purging subsystem is also configured to maintain the same level of purging in both optical subsystems. Some systems also include a cleaning subsystem configured to remove contaminants from a portion of a specimen prior to measurements at vacuum ultraviolet wavelengths. |
| priorityDate |
2004-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |