http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005108446-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55dd969994a13877f680fa0eff3d3939 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d339757b60821379b7b1a342d527385 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bab1101a53e8679b6014a0224af0087b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F236-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F214-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L47-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F236-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F214-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2005-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d63ba59c6ad7407eb407a812757a9902 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b1836c6c2ed866ac9c261cff5ee8486 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c44fb14554272cf774f4019772b35f57 |
| publicationDate | 2005-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2005108446-A1 |
| titleOfInvention | Fluorine-containing copolymer, method for producing same and resist composition containing same |
| abstract | Disclosed is a fluorine-containing copolymer having a unit derived from a monomer unit formed by ring-forming polymerization of a fluorine-containing diene represented by the formula (1) below, and a unit derived from a monomer unit formed by ring-forming polymerization of a functional group-containing fluorine-containing diene having a specific structure or a monomer unit formed by polymerization of an acrylic monomer having a specific structure. Also disclosed are a method for producing such a fluorine-containing copolymer and a resist composition containing such a fluorine-containing polymer. CF2=CFCH2CH(C(CF3)2(OR3))CH2CR1=CHR2 (1) In the formula (1), R1 and R2 independently represent a hydrogen atom or an alkyl group having not more than 12 carbon atoms; R3 represents a hydrogen atom, an alkyl group having not more than 20 carbon atoms, an alkoxycarbonyl group having not more than 15 carbon atoms or CH2R4 (wherein R4 represents an alkoxycarbonyl group having not more than 15 carbon atoms); and a part of or all of the hydrogen atoms in the alkyl group, alkoxycarbonyl group or R4 constituting R3 may be substituted with fluorine atoms and the alkyl group, alkoxycarbonyl group or R4 constituting R3 may have an ether oxygen atom. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7244545-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1679297-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1679297-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006132287-A1 |
| priorityDate | 2004-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 131.