| abstract |
The present invention provides an electro-mechanical device , for example , a Micro-Electro-Mechanical Systems (MEMS) device, for example a low-loss Film Bulk Acoustic Resonators (FBAR) filter, and a process to produce the same. In order to avoid the contamination of the cavities of the membrane that may affect the operation of the MEMS device, the present invention relates to a MEMS Film Bulk Acoustic Resonator comprising a base structure (102) , a membrane (112) and a cap layer (114) having first side attached to said base structure and second side attached to said membrane wherein one or more sealed cavities (116)are encapsulated between said base structure and said cap layer . |