| abstract |
A method for processing a substrate (25, 620, 720) on a ceramic substrate heater (20, 600, 700) in a process chamber (10). The method includes forming a protective coating (730, 790) on the ceramic substrate heater (20, 600, 700) in the process chamber (10) and processing a substrate (25, 620, 720) on the coated substrate heater. The processing can include providing a substrate (25, 620, 720) to be processed on the coated ceramic substrate heater, performing a process on the substrate (25, 620, 720) by exposing the substrate (25, 620, 720) to a process gas, and removing the processed substrate from the process chamber (10). |