Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef386da3d1128198d383e8288c1fabf http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ca748d5cbfb6d9d2f2c6013230fccd73 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f184910b37c6347416c6c222e3ada49 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_588d8e3686ce67547078c03aeaadaf92 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49155 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-4913 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07371 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0735 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
filingDate |
2005-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d8a291f1252efe72875bee8675eea00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae1e028f1f224f8ee663840f11a2aec1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4435be963fed584a40b7ac54dcb0d8dc |
publicationDate |
2005-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2005098462-A2 |
titleOfInvention |
Probe card and method for constructing same |
abstract |
In one embodiment, a probe card for testing dice on a wafer (240) includes a substrate (120), a number of cantilevers (122) formed on a surface thereof, and a number of probes (128) extending from unsupported ends of the cantilevers. The unsupported ends of the cantilevers (122) project over cavities (124) on the surface of the substrate (120). The probes (128) have tips to contact pads (241) on the dice under test. The probe card may include a compressive layer (130) above the surface of the substrate (120) with a number of holes through which the probes (128) extend. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10313440-B2 |
priorityDate |
2004-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |