| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9b872416f1de1251257d68612c4c7ee5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c45becdeee7a17a2bf90797370898d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_acd8dd05451543fed68518e4490e159f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a57d39f41643d103e55753c0519ca44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f398c8b6ba03338163bfd6d32222dbf9 |
| publicationDate |
2005-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2005064663-A1 |
| titleOfInvention |
Ultraviolet ray cleaning device and cleaning method |
| abstract |
An ultraviolet ray cleaning device for cleaning a to-be-treated object being conveyed by irradiation of ultraviolet rays on the object from an ultraviolet ray lamp (32). The ultraviolet ray cleaning device is characterized by having a gas supply route constructed such that a gas is blown on an ultraviolet ray irradiation surface of the object after passing through a gas diffusion plate (35). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11590509-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10307763-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018189164-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3106434-A4 |
| priorityDate |
2003-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |