Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b479be00639d3f30c976750b77445e60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_86308c660a650dda5bb04b8fbb7c077d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_570339de6399d2198df75e84103a54c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b2ac87aeadb161b83426d9cf6c4bdc http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b12cfaff62b560a58da1b246d0214df3 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-855 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-855 |
filingDate |
2004-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d6760852b64f037c50dc4c87499b6a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81f629d6928da45b8c6052ea05a2061d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e03f839abcd97412703cec534357fd74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a99badfe4184555515e3b18df3c06b40 |
publicationDate |
2005-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2005064598-A1 |
titleOfInvention |
Method for filling concave portions in concave/convex pattern and magnetic recording medium manufacturing method |
abstract |
There are provided a method for filling concave portions in a concave/convex pattern capable of effectively filling the concave portions in the concave/convex pattern and surely flattening the surface and a magnetic recording medium manufacturing method capable of effectively manufacturing a magnetic recording medium having a magnetic recording layer of concave/convex pattern and having a sufficiently flat surface. On the surface of a work (10) having a concave/convex pattern, a film of filling material (36) is formed for filling the concave portions (34). Further, on the filling material (36), a film of coating material (42) is formed. By using the dry etching method having an etching rate for the coating material (42) lower than the etching rate for the filling material (36), a surplus of the filling material (36) and the coating material (42) is removed from the surface of the magnetic recording layer (32), thereby making the surface flat. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007172691-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9318684-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008130181-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7616404-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103901516-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4510796-B2 |
priorityDate |
2003-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |