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filingDate 2004-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b80d4dd35655077f077d2b70822f521
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publicationDate 2005-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2005053026-A1
titleOfInvention Multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same
abstract In accordance with the teachings described herein, a multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same are provided. The multi-level thin film capacitor (MLC) may include at least one high permittivity dielectric layer between at least two electrode layers, the electrode layers being formed from a conductive thin film material. A buffer layer may be included between the ceramic substrate and the thin film MLC. The buffer layer may have a smooth surface with a surface roughness (Ra) less then or equal to 0.08 micrometers (um).
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10553363-B2
priorityDate 2003-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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