| abstract |
The invention describes a sensor comprising a substrate 1 and at least one resonator, said resonator is c mprised of an acoustic reflector 2, a piezoelectric layer 5, a first and a second elec ode 3, 4 placed on the same side of the piezoelectric layer 5, and a sensing layer 6. The sensing layer reacts with a chemical or biological agent by absorption, adsorption, desorption or chemical reaction. As a result the individual frequency of a resonator changes and conclusions about the agent can be drawn. Such sensor is very sensitive to an agent being sensed, especially when used in liquids. |