| abstract |
An exemplary micro or nano-electromechanical analyte detection device (100, 200, 300, 400, 500, 600, 700, 800, 900) includes a cantilever (106, 108, 110, 140, 208, 302, 320, 402, 502, 602, 604, 902), nano-wire (702, 824), or other suspended member (330) for detecting selected biological or chemical species (132, 304, 618) based on the change in resonant frequency, surface stress, or other characteristic of the suspended member upon interaction of a selected analyte. Dielectrophoresis is utilized to concentrate a selected analyte, for example at the free end (142, 306, 610, 612, 904) of the cantilever or other suspended member. The suspended member may also include a region (404, 510, 824) of a transistor (512), for example a channel of a field affect transistor to provide on chip electronic detection of selected analytes. Integrated devices having an array of suspended members for detecting selected analytes located within a fluid channel (104) are also disclosed as well as methods of use and methods of fabrication of the exemplary integrated devices. |