| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02 |
| filingDate |
2004-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0078b10de7a392a29063d39e581b721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5770502db57616c728f7ce39f2b43c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebf7f9da6c34dbfea5f36dbc550c04c6 |
| publicationDate |
2005-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2005021173-A1 |
| titleOfInvention |
Method of cleaning substrate processing chamber components having textured surfaces |
| abstract |
A method of fabricating a substrate processing chamber component involves forming a component having a textured surface and sweeping a jet of pressurized fluid across the textured surface of the component. The jet of fluid is pressurized sufficiently high to dislodge substantially all the particles from the textured surface. The method can be applied to dislodge grit particles from textured exposed surfaces formed by electromagnetic energy beam scanning and grit blasting. The method can also be applied to remove loosely adhered coating particles from the textured surfaces of coated components. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8617672-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7942969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9481608-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7981262-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7993470-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8980045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7910218-B2 |
| priorityDate |
2003-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |