http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005011080-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9e5d69cc6b8fd5af41715cafe21e9569 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2402447759f01bc52c34d558e5db4046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8129141e66f064879cd498fe98a9514b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate | 2004-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f75c30ead9011342251d4425cc7113d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccf5f51af17ade7003697235120eece7 |
| publicationDate | 2005-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2005011080-A2 |
| titleOfInvention | Apparatus for and method of cooling and positioning a translating substrate tape for use with a continuous vapor deposition process |
| abstract | The present invention is an apparatus for and method of cooling and positioning a translating substrate tape during a continuous high-throughput deposition process such as IBAD that is characterized by a long deposition zone where the substrate tape comes into contact with a substrate assembly as it translates the length of the deposition zone. A chilled liquid passes through the substrate assembly, maintaining the temperature of the substrate assembly below a specified level. Also passing through the substrate assembly is an inert gas that exits at an interface between the translating tape and the substrate assembly. |
| priorityDate | 2003-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.