http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005006351-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9e5d69cc6b8fd5af41715cafe21e9569 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate | 2004-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_deb04e5274cf8f3cc06696019452dbe0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_839075c165a93a375ea3a6f6ffde6b06 |
| publicationDate | 2005-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2005006351-A2 |
| titleOfInvention | Apparatus for and method of continuous hts tape buffer layer deposition using large scale ion beam assisted deposition |
| abstract | The present invention is a high-throughput ion beam assisted deposition (EBAD) system and method of utilizing such a system that enables continuous deposition of thin films such as the buffer layers of HTS tapes. The present invention includes a spool-to-spool feed system that translates a metal substrate tape through the EBAD system as the desired buffer layers are deposited atop the translating substrate tape using an e-beam evaporator assisted by an ion beam. The system further includes a control and monitor system to monitor and regulate all necessary system parameters. The present invention facilitates deposition of a high-quality film over a large area of translating substrate. |
| priorityDate | 2003-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.