http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005004185-A2
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_50b68da5385eab3847df9b97039d28b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b80dcbe1e16d0a6137bd7202999ecb26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_791bfde4d7e57aaa2b93c13f6472b7da http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a6b135298ce1d109e9c9b384e6f6055 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J- |
filingDate | 2004-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a188bf099cc5de47c718c469bd6ab26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb8da0cfd363b59e197fc811bc16a42b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd09f4e0a12b973c8486b4160e090bae |
publicationDate | 2005-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | WO-2005004185-A2 |
titleOfInvention | Forming carbon nanotubes at lower temperatures suitable for electron-emitting device, and associated fabrication method |
abstract | An electron-emitting device contains a vertical emitter electrode patterned into multiple laterally separated sections situated between the electronemissive elements, on one hand, and a substrate, on the other hand. The electron-emissive elements comprising carbon nanotubes are grown at a temperature range of 300 °C to 500 °C compatible with the thermal stress of the underlying substrate. The electron-emissive elements are grown on a granulized catalyst layer that provides a large surface arda for growing the electronemissive elements at such low temperature ranges. To ensure growth uniformity of the carbon nanotubes, the granularized substrate is soaked in a pre-growth plasma gas to enhance the surface diffusion properties of the granularized substrate for carbon diffusion. |
priorityDate | 2003-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.