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filingDate 2004-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2ef9e6e8294c0de7dcd5dd07c28f906
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publicationDate 2004-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2004092831-A2
titleOfInvention Photoresists and methods for use thereof
abstract New photoresists are provided that can be applied and imaged with reduced undesired outgassing and/or as thick coating layers. Preferred resists of the invention are chemically-amplified positive-acting resists that contain photoactive and resin components.
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