| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4cd40a53f4740c9adda45b87b64e3d13 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F- |
| filingDate |
2004-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8eb250a1024af34720f2ecd45639fd84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0f1b4f25b4d9673050a9ba146ff01c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bc41e4b98275b91ffdd2060018795fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b88fc7707891562d30b3df3ed05f32b |
| publicationDate |
2004-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2004088414-A2 |
| titleOfInvention |
Positive tone bi-layer imprint lithography method and compositions therefor |
| abstract |
The present invention provides a method and compositions to pattern a substrate that features creating a multi-layered structure by forming, on the substrate, a patterned layer having protrusions and recessions. Formed upon the patterned layer is a conformal layer, with the multi-layered structure having a crown surface facing away from the substrate. Portions of the multi-layered structure are removed to expose regions of the substrate in superimposition with the protrusions, while forming a hard mask in areas of the crown surface in superimposition with the recessions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8415010-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009524936-A |
| priorityDate |
2003-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |