| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ef3d3bc9fb14d5d653b2f08ecb2206f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_466c6400703f3ff42ff41f15f3ad7513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8401bd1a86a10d5508942a53475fc38 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1492
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1572
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-08 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 |
| filingDate |
2004-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae3706ed23be0af44b0679d0b1ab2948
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3595a9a8f8ecbbabbe3e1a52a4a1ed0a |
| publicationDate |
2004-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2004081262-A1 |
| titleOfInvention |
Method of electroplating a workpiece having high-aspect ratio holes |
| abstract |
In order to electroplate workpieces comprising high-aspect ratio holes a method is disclosed comprising the steps bringing the workpiece and at least one anode into contact with a metal plating electrolyte, and applying a voltage between the workpiece and the anodes, to the effect that a current flow is provided to the workpiece. The current flow is a pulse reverse current flow having a frequency of at most about 6 Hertz. According to the frequency each cycle time comprises at least one forward current pulse and at least one reverse current pulse. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9526183-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102013104070-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9435048-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9445510-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9376758-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009301889-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8784634-B2 |
| priorityDate |
2003-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |