http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004080888-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-097 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate | 2004-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f37371c2d7d07bfd8958c30905394c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_575bc21aa639fb449842f5f033cddaef |
| publicationDate | 2004-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2004080888-A1 |
| titleOfInvention | System and method for buried electrical feedthroughs in a glass-silicon mems process |
| abstract | A method for providing conductive paths into a hermetically sealed cavity (84) is described. The sealed cavity is formed utilizing a silicon-glass micro electromechanical structure (MEMS) process and the method includes forming recesses (82) on a glass substrate (80) everywhere that a conductive path is to pass into the cavity, and forming conductive leads (86) in and around the recesses. A glass layer (92) is deposited over the substrate, into the recesses, and over the conductive leads and then planed to expose portions (88) of the conductive leads. A sealing surface (94) is formed on at least a portion of the glass layer. Silicon is then bonded (154) to the sealing surface of the planarized glass layer, the wafer (120) being configured such that a portion of each lead is within the sealed cavity and a portion of each lead is outside the sealed cavity. |
| priorityDate | 2003-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.