http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004078868-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b8b4357b1be08dc56656fec95f1b383 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9bceffddb90b9b3da8a772212961764b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C27-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2004-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d5fa9f199c2babe2d042d20b2e3bee2 |
| publicationDate | 2004-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2004078868-A1 |
| titleOfInvention | Vacuum ultraviolt ray bonding apparatus |
| abstract | A vacuum ultraviolet bonding apparatus for adhering material alkoxide to the bonded surface of bonded substances and radiating vacuum ultraviolet on the adhered surface for bonding, comprising a vacuum ultraviolet ray source part having a light source generating vacuum ultraviolet ray, a radiation chamber radiating ultraviolet ray to two bonded substances allowing the vacuum ultraviolet ray to be transmitted therethrough, and an exhaust device forcibly exhausting the air in the vacuum ultraviolet ray source part and the radiation chamber. The vacuum ultraviolet ray source part and the radiation chamber are vacuated or nitrogen gas or rare gas is filled in the vacuum ultraviolet ray source part and the radiation chamber. Also, a partition window formed of a substance allowing the vacuum ultraviolet ray to be transmitted therethrough is provided between the vacuum ultraviolet ray source part and the radiation chamber. Thus, the highly efficient, economical, and optimum vacuum ultraviolet ray bonding apparatus can be provided by using short wavelength ultraviolet ray of 200 to 50 nm. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104175551-A |
| priorityDate | 2003-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.