http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004071737-A3

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filingDate 2003-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbd8d8a514e18c5be128a83671f61fa1
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publicationDate 2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2004071737-A3
titleOfInvention Using benzocyclobutene as a biocompatible material
abstract A biocompatible device is made with benzocyclobutene (BCB) material for implanting in live tissue. The biocompatible device may be a biosensor (10) having a thin film substrate comprising BCB. To make the biosensor, an adhesion promoter is dispensed (20) onto silicon wafer and spun to distribute the adhesion promoter. BCB resin is dispensed (22) onto a silicon wafer. The silicon wafer is spun to distribute the BCG resin. The BCB resin on the silicon wafer is cured (24) to form a BCB thin film layer. The biocompatible device is patterned (26) in the BCB thin film layer on the silicon wafer. BCB residue is removed (34) from the silicon wafer. A final cure is performed on the BCB thin film. The biocompatible device is removed (36) from the silicon wafer.
priorityDate 2003-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 27.