abstract |
An adamantane derivative represented by the general formula (I) or (II): (I) (II) wherein X represents halogeno; Y represents C1-10 alkyl, C1-10 haloalkyl, halogeno, or a heteroatom-containing group; R1 to R4 each independently represents hydrogen, halogeno, C1-10 alkyl, or C1-10 haloalkyl; m is an integer of 0 to 15; and n is an integer of 0 to 10; provided that in the general formula (I), the case where both of m and n are 0 and both of R3 and R4 are hydrogen is excluded. It is a novel adamantane derivative useful as a modifier for photoresist resins in the field of photolithography, a dry-etching resistance improver, an intermediate for agricultural chemicals and medicines, and other various industrial products. |