| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec66dc35d17dbe995453d8632d027efd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f78c7fce5743cbed82061576f839237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c30e8a2248ee5bef57f852132563d86 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate |
2003-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8151e5c0b5f7f76e3f86d738c07bc28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcc439838c938367687a09f33bfef85d |
| publicationDate |
2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2004057052-A1 |
| titleOfInvention |
Resistance-heated boat and manufacturing method thereof |
| abstract |
Disclosed herein are a resistance-heated boat and a manufacturing method thereof for use in vacuum vapor deposition of a metal evaporant onto a substrate in a resistance heating manner. The boat comprises a graphite block to be formed into a boat, and a protective barrier formed at the graphite surface for preventing the graphite layer from reacting with the metal evaporant. The protective barrier has an aluminum-rich layer, and a nitrogen containing compound layer. According to the present invention, it is possible to achieve stable and continuous evaporation of metals including aluminum. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007138276-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7494616-B2 |
| priorityDate |
2002-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |