| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1543b2b19ec0e331a0dcd89888cbef5f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2003-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_664ca584fea7f83cfb8c7286700986db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_581dc3975345bb7cef9ca6af0efccf3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27e4fa8ba74ded74e511783350a25c5b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6507db329b70eaa4def6ae0475066205 |
| publicationDate |
2004-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2004042473-A2 |
| titleOfInvention |
Ionic photoacid generators with segmented hydrocarbon-fluorocarbon sulfonate anions |
| abstract |
Photoacid generator salts comprising photoactive cationic moieties and segmented, highly fluorinated-hydrocarbon anionic moieties are disclosed which provide high photoacid strength and can be tailored for solubility and polarity. The present invention further relates to photoacid generators as they are used in photoinitiated acid-catalyzed processes for uses such as photoresists for microlithography and photopolymerization. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102541313-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102463391-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200093059-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220151221-A |
| priorityDate |
2002-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |