| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c10ea7fe2044db73894b702a7c44cf2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d36266182ccc861249d08c7b6c9e8e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f85345f1f3c5c23132116245321b6a13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ca21b3f95ddabd9213b3bcb3596f1063 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14 |
| filingDate |
2003-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b9b0da6503e2f2fd0e127e4f821c830
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad3662e97353a9e62eb91082d26cf414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff0efab86a6841287be172e420c04deb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9983191a7cba9390b20ae924062540dc |
| publicationDate |
2004-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2004032184-A2 |
| titleOfInvention |
Low temperature salicide forming materials and sputtering targets formed therefrom |
| abstract |
Metal-based precursor materials as described herein have an overall Curie temperature and include: a) a first material constituent having a first Curie temperature component; and b) at least one additional material constituent having a second Curie temperature component, wherein the overall Curie temperature is lower than the first Curie temperature component. Methods are also described of forming a metal-based salicide precursor material having an overall Curie temperature including: a) providing a first material constituent having a first Curie temperature component; b) providing at least one additional material constituent having a second Curie temperature component; and c) combining the first material constituent and the at least one additional material constituent such that the overall Curie temperature is lower than the first Curie temperature. |
| priorityDate |
2002-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |