http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004027830-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_27562ace359200dce7274340b5c7c28b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95676 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95607 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-896 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 |
| filingDate | 2003-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f70f8ff327c49d41f269e86b60d8436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1497411e371ba7e218e7416c194260f1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebbdacd6b8cd7011519691d08f5c512c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e8795f5951d06a9d07e315325ada121 |
| publicationDate | 2004-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2004027830-A2 |
| titleOfInvention | Method and system detecting phase defects in phptomasks and wafers |
| abstract | Provided are apparatus and methods for detecting phase defects. The invention relies generally on the distortion of light as it passes through defects in phase shift masks to detect these defects. Light traveling through a defect, such as a bump in an etched area will travel at a different angle than light traveling through air. In order to enhance the signals generated from the defects, the invention in several embodiments provides a multiple element detector (700) having at least four elements (701-716), arranged in a radially symmetric configuration. Individual elements of the detector (700) are selected to form a differential signal based on the configuration of pattern lines in the area proximate to the defect. The resulting differential signal is used to generate an image signal and to identify phase defects. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103389311-A |
| priorityDate | 2002-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.