http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004021084-A3

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filingDate 2003-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3198d7051d155a785cca2b911519c761
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publicationDate 2004-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2004021084-A3
titleOfInvention Decal transfer microfabrication
abstract A method of making a microstructure includes forming a pattern in a surface of a silicon-containing elastomer, oxidizing the pattern, contacting the pattern with a substrate; and bonding the oxidized pattern and the substrate such that the pattern and the substrate are irreversibly attached. The silicon-containing elastomer may be removably attached to a transfer pad.
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Total number of triples: 27.