| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89c0e841ebc3b867b6f3ae87ea71ea5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4a4f361eccec8d7a413e9a2c64fa321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d4657460266cc4f1fcf234f82347463b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d13f2ab3429f40f0dcd1cfc22cc02ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4f91ed6e2798fb08d1574f9b3cc5a266 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2003-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6614f4f7fdf81f20ed70ee9b64a15641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30e85b1f8719f75d8995a41bb613d646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40dc2f080f693692a0eaebc4dab7e1f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35936daf2d82517e07b0541b5dd1cc68 |
| publicationDate |
2004-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2004019130-A1 |
| titleOfInvention |
Process for producing a patterned oxide film on a substrate |
| abstract |
A process for producing a patterned oxide film on a substrate by dissolving an oxide forming powder in a solvent that is photosensitive and/or to which a photosensitiser is added to form a photosensitive solution of the oxide forming powder, depositing the solution on a substrate and drying it to form a film, masking an area of the film and exposing an unmasked area to a light source such as ultraviolet light to reduce the solubility of the unmasked area in a suitable solvent whereby the masked area can be selectively dissolved to leave the unmasked area having a desired pattern, and heating the unmasked area to form an oxide film having the desired pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005109097-A1 |
| priorityDate |
2002-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |