| abstract |
A printhead having a monolithic semiconductor body (26) which defines a pressure chamber (33), a nozzle flow path (66) and a nozzle opening (22). A piezoelectric actuator (28) is associated with the pressure chamber, it includes a piezoelectric layer 76 having a thickness of about 50 microns or less. The semiconductorbody also defines a filter/impedance feature (32) having a plurality of flow openings. The semiconductor body is preferably a polished SOI wafer. In another aspect, the invention features a printhead with a piezoelectric byer having a surface Ra of about 0,05 microns or less, or at least one surface including a void-filler material. |