http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03107400-A2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02019
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04
filingDate 2003-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d489328aacf4b6d012dd3db32336c6ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3063d692e45e839346e55cb64f252317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86ad69447a9604d97b2093595f764fd9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea0c9021e06b5570f182c5d2226d7a96
publicationDate 2003-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-03107400-A2
titleOfInvention Acid etching mixture having reduced water content
abstract Acid etching mixtures having water content, reduced by the addition of fluorosulfonic acid. The preparation and the use of said acid etching mixtures, particularly in etching silicon, are also disclosed.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102656250-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102656250-B
priorityDate 2002-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0304857-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-1383662-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0618612-A2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24603
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24556
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546197
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556104
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411550722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71777668
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454600108
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID65185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593449
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541

Total number of triples: 42.