http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03103894-A3
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94b59679f6977a0882adb7bde9b9871c |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2002-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bebefa260b4828f55ac876fc39024c58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f342ee847a22eac9132a51d5b604806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_760bd85c75576d154c6dfeaac049ee3c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e20cbed1d059d624b8089d4e8fb8caec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b5afbd1b123564eff101bec257e7b1b |
| publicationDate | 2004-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-03103894-A3 |
| titleOfInvention | COMPOSITIONS FOR MECHANICAL CHEMICAL PLANARIZATION OF COPPER |
| abstract | The invention relates to mechanical chemical planarization ("CMP") of copper surfaces and CMP suspensions of copper comprising an oxidant, one or more hydroxylamine compounds and at least one abrasive. The hydroxylamine compositions can include hydroxylamine nitrate, hydroxylamine, hydroxylamine sulfate, ammonia salts and mixtures of these products. The oxidants can also include citric acid as a complexing agent for copper. Sulfuric acid and / or nitric acid make it possible to modify the pH of the oxidant, so that the chemistry of the hydroxylamine is acidic. Some embodiments relate to corrosion inhibitors, such as benzotriazole, 2,4-pentadione dioxime and / or 1,6-dioxaspiro [4,4] nonane 2,7-dione, as well as a radical inhibitor , preferably hydrazine. Colloidal silica and ground alumina are used as conventional abrasive components. |
| priorityDate | 2001-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.