| abstract |
A method for integrally fabricated MEMs devices with include micro or nanoparticles by providing a mixture (16) of sacrificial material (12) and a multiplicity of particles (10), disposing the mixture (16) on a substrate (14), fabricating a MEMs structure on the substrate (14) including at least part of the mixture (16), so that at least some of the mixture (16) is enclosed in the MEMs structure, removing the sacrificial material (12), and leaving at least some of the multiplicity of particles (10) substantially free and enclosed in the MEMs structure. The step of fabricating a MEMs structure is quite general and is contemplated as including one or a multiplicity of additional steps for creating some type of structure in which the particles (10), which may be microbeads or nanobeads, are included. |