| abstract |
A method for polishing wherein an article is polished by the thrust thereof on fixed abrasive grains with sliding, characterized in that it comprises a first step of polishing the article to be polished while feeding a polishing fluid which contains an anionic surfactant and no abrasive grains, and a second step of polishing the article to be polished while feeding a polishing fluid which contains a cationic surfactant and no abrasive grains. |