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filingDate 2003-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d154c73bf943de227b7dbd337e8f9a3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2ac3a43ca3a5fcc1cd7a41b18d9be93
publicationDate 2003-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-03060045-A1
titleOfInvention Aqueous stripping and cleaning composition
abstract The present invention relates to aqueous compositions used to remove post etch organic and inorganic residue as well polymeric residues and contaminants from semiconductor substrates. The compositions are comprised of a water soluble organic solvent, a sulfonic acid and water.
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