Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1543b2b19ec0e331a0dcd89888cbef5f |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T442-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249955 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B9-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-36 |
filingDate |
2002-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb49cdcf60cb3c86c6c53e8da0f2fd09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07995a7c0693d890d16b9392d33eb311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d12faaab890ecfee6174d049a93d91bb |
publicationDate |
2003-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-03051969-A2 |
titleOfInvention |
Plasma fluorination treatment of porous materials |
abstract |
The application discloses articles and methods of plasma fluorination treatment that employ a capacitively-coupled system to fluorinate porous articles. The methods include placing the article to be treated within an ion sheath adjacent to an electrode and placing the article to be treated between powered and grounded electrodes separated by about 25 mm or less. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006119004-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2240297-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2240297-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103261510-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010114826-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10464001-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006119004-A2 |
priorityDate |
2001-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |