| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da3b6ec3e3e092be5a8d375f17a6423b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C1-086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C1-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C11-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C11-00 |
| filingDate |
2002-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82135ed7c4b04ce93eac63df9a1a5c02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7a7901c30252f303eef35c044718e10 |
| publicationDate |
2003-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-03040433-A1 |
| titleOfInvention |
Process for cleaning components using cleaning media |
| abstract |
A method for cleaning a semiconductor processing component is provided. The process calls for directing a stream of cleaning media at a surface of the component, the cleaning media including zirconia. After cleaning with the cleaning media, frozen CO2 (dry ice) pellets may be directed at the surface to further clean the component. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101842193-A |
| priorityDate |
2001-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |