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publicationDate 2003-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-03038873-A2
titleOfInvention Removing an amorphous oxide from a monocrystalline surface
abstract A method of removing an amorphous oxide (24) from a surface of a monocrystalline substrate (22) is provided. The method includes depositing a passivation material (26) overlying the amorphous oxide. The monocrystalline substrate is then heated so that the amorphous oxide layer decomposes into at least one volatile species that is liberated from the surface.
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priorityDate 2001-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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