http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03030185-A9
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_035897f11b54480f7091289c320f1b39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-148 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-30 |
| filingDate | 2002-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_730d053e91e9002b26350ffcdee54536 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4277ac33f1d07ac9308f45b05b2ed7e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27803fe33035792cc3285e0f7bb596ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32d5fcca5c340249c23059fcf8b02a6b |
| publicationDate | 2003-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-03030185-A9 |
| titleOfInvention | Method for implementing an efficient and economical cathode process |
| abstract | The present writing reveals a method of fabricating a cathode requiring relatively few and somewhat simple steps. A novel etchant gas chemistry dispenses with needing a second passivation layer (PA2). A direct via is formed without a separate mask. Access and isolation features of a metallic gate (MG) are patterned in the same patterning operation as an associated passivation layer, dispensing with a need for separate patterning of each. Etching is effectuated with high selectivity for nitrides of silicon. The requirement for at least one passivation layer deposition, a direct via masking step, and separate patterning steps for the passivation layer and metallic gate are eliminated. |
| priorityDate | 2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.