| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_950bce8d103dab1bd282965fde47f9f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2002-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4971b601ab66c02c585cf3a3d8deeb84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6895aece2b37a86f1ff992fed360a4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcc967c6dbaf9a8a2dc97392f24e4edc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5b57f5ea9b21c8867fe611298f76d3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fc6982015cc8feabaeb82102e186603
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e4173128b3d7ea60a6777b61e7879b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4597110879bb98ef82db56e5e108237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a49ecbdda80887d13d7a8d5c5548018 |
| publicationDate |
2003-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-03025994-A1 |
| titleOfInvention |
Ultraviolet curing process for porous low-k materials |
| abstract |
Low dielectric constant porous materials with improved elastic modulus. The process of making such porous materials involves providing a porous dielectric material and ultraviolet (UV) curing of the porous dielectric material to produce a UV cured porous dielectric material. UV curing of the porous dielectric material yields a material with improved modulus and comparable dielectric constant. The improvement in elastic modulus is typically greater than about 50%. The porous dielectric material is UV cured for no more than about 300 seconds at a temperature less than about 450°C. The UV cured porous dielectric material can optionally be post-UV treated. Rapid Anneal Processing (RAP) of the UV cured porous dielectric material reduces the dielectric constant of the material while maintaining an improved elastic modulus as compared to the UV cured porous dielectric material. The annealing temperature is typically less than about 450°C, and the annealing time is typically less than about 60 minutes. The post-UV treated, UV cured porous dielectric material has a dielectric constant between about 1.1 and about 3.5 and an improved elastic modulus. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7893538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7932188-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7932295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005010971-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7994069-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7291567-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007534174-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7399715-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7468290-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006528426-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1457583-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007088908-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7294453-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005010971-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4769344-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008520100-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7163780-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8268403-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006190872-A |
| priorityDate |
2001-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |