abstract |
A process for producing a monomer for resists which is represented by the general formula (1): (1) wherein R1 represents hydrogen or optionally substituted alkyl; R2, R3, and R4 each independently represents hydrogen or a substituent; and X, Y, and Z each independently represents a direct bond or optionally substituted C1-3 alkylene, the process comprising conducting esterification or transesterification in the presence of a biocatalyst. |