| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-0056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate |
2002-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e232f6ba32fc07ba98de82132d45889
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b7606dbaccf3428370079d299a159f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f451512e840ecc64ae401048203b04d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_408c5c237358db939f26cc511c4b1005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9cffe14f7037b00bcdb013fffaa1bc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d3cc3a2b126b2cf78e588d86e73e78e |
| publicationDate |
2003-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-03015981-A3 |
| titleOfInvention |
Improved chemical mechanical polishing compositions for metal and associated materials and method of using same |
| abstract |
A chemical mechanical polishing slurry composition and method for using the slurry composition for polishing copper (14), barrier material (13), and dielectric material (12) that comprises first and second-step slurries. The first-step slurry has a high removal rate on copper and a low removal rate on barrier material. The second-step slurry has a high removal rate on barrier material and a low removal rate on copper and dielectric material. The first slurry comprises at least an organic polymeric abrasive. |
| priorityDate |
2001-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |