| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_709b4a26ef028713f9b302509eb824d7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-0147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F2201-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-4249
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2006-12097 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-1225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-12004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-1221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-4214 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-01 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-122 |
| filingDate |
2002-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d3f2fcaa926aea71e49534e98c0520a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a9172a242b9e2eb58f1af863a159e66 |
| publicationDate |
2003-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-03010565-A2 |
| titleOfInvention |
Optical waveguides and grating structures fabricated using polymeric dielectric compositions |
| abstract |
Using polymeric dielectric materials (preferably materials derived from bisbenzocyclobutene monomers) and an electron beam lithography process for patterning this material, we have developed a process for fabricating optical waveguides with complex integrated devices such as gratings. Such gratings are not limited to one-dimensional type gratings but can include 2 dimensional gratings such as curved gratings or photonic crystals. Due to the properties of BCB, this process could also be implemented using optical photolithography depending upon the waveguide dimensions desired and the grating dimensions desired. Alternatively, the optical waveguide could be patterned using optical lithography and the grating can be patterned using electron beam lithography. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7693383-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1788011-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1788011-A3 |
| priorityDate |
2001-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |