| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b0dfcd282e0fb08e30e36d40773ae21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f517e4f571afcbb6e2522b61c6227a79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fd5877d2a0da981d9724068280c608f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b94553aded5136d66f2cb38d18e58717 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2002-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecc76c3509143f5eec37339c59850c92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad5798670afe3e0848eec4c2a422a56f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f066774656a87b43889694e674f7139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_915b5fca43f8dbb6bce3186371374cee |
| publicationDate |
2003-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-03003124-A1 |
| titleOfInvention |
Photoresist stripper composition |
| abstract |
A photoresist stripper composition containing an amine compound and at least one alkanolamide compound selected from the group consisting of compounds represented by the general formulae (I) and (II) and polymers of compounds of the general formula (I) wherein R1 is alkenyl: (I) (II) (wherein R1, R2 and R3 are each as defined in the description). The stripper composition makes it possible to strip extremely easily a photoresist layer remaining after etching and resist residue after ashing without corroding wiring material and so on. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8178482-B2 |
| priorityDate |
2001-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |